The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 1995

Filed:

May. 01, 1992
Applicant:
Inventors:

Krzysztof Kempa, Billerica, MA (US);

Roman Litovsky, Newton, MA (US);

Assignee:

Exid, Inc., Billerica, MA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
374-5 ; 219711 ; 374-7 ; 374124 ; 374137 ; 356237 ; 2503381 ;
Abstract

A method and system for probing a volume of material by detecting local conductivity in the material using microwave radiation. The probed volume of material is exposed to microwave radiation of a wavelength selected to excite the carriers of electrical current and induce localized heating in regions of the volume of material which is an electronic material or a device. A thermographic imaging system detects size and distribution of the locally heated regions, and a processing system determines a selected property of the material by analyzing the size and distribution of the locally heated regions. The thermographic imaging system can be an infra-red imaging system which detects infra-red radiation emitted from the locally heated region, or it can be a system which deposits a thermally sensitive film onto a surface of the material and detects thermally induced changes in the deposited film caused by the transferred heat. The testing system can be also used in conjunction with a light source to probe distribution of photoexcited carriers, or with an electronic testing system to examine local conductivity and performance of devices in an active or passive state.


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