The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1995
Filed:
Jun. 10, 1993
Applicant:
Inventors:
Steven J Sherman, Andover, MA (US);
Robert W Tsang, Bedford, MA (US);
Theresa A Core, North Andover, MA (US);
A Paul Brokaw, Burlington, MA (US);
Assignee:
Analog Devices, Inc., Norwood, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P / ; G01P / ;
U.S. Cl.
CPC ...
7351 / ; 7351 / ;
Abstract
The invention is a monolithic sensor comprising a silicon substrate, a suspended polysilicon microstructure for sensing a condition disposed above and suspended from the substrate, and circuitry for resolving a signal based on said sensed condition, the circuitry including bipolar circuit elements and MOS circuit elements. One disclosed embodiment is particularly adapted for sensing acceleration by means of a differential capacitor arrangement in which one capacitor plate in the arrangement is moveable responsive to an acceleration.