The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 1995
Filed:
Feb. 09, 1993
Applicant:
Inventors:
Gregor Strasser, Furstentum, LI;
Pius Good, Mels, CH;
Jurg Steinmann, Walenstadt, CH;
Roman Schertler, Wolfurt, AT;
Assignee:
Balzers Aktiengesellschaft, , LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16J / ;
U.S. Cl.
CPC ...
216 67 ; 156345 ; 118733 ; 20429802 ; 20429835 ; 20429831 ;
Abstract
A vacuum treatment apparatus which is used for the surface treatment of substrates or workpieces in a chamber, includes at least one pneumatically or hydraulically operated seal. The seal can be activated to close against a member for sealing off the chamber, particularly, after a substrate or workpiece has been transported into or removed from the chamber.