The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 16, 1995

Filed:

Jul. 07, 1993
Applicant:
Inventors:

Patrick S Nicholson, Ancaster, CA;

Aichun Tan, Dundas, CA;

Chu K Kuo, Hamilton, CA;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C30B / ;
U.S. Cl.
CPC ...
117 90 ; 117 84 ; 117 88 ;
Abstract

Disclosed herein is a method of forming a single crystal film of sodium-beta'-alumina, comprising the steps of providing a single crystal substrate with one surface being arranged to minimize nucleation sites thereon, at least a portion of the substrate including alumina. A single crystal substrate is then deposited in a chamber, along with a precursor in the chamber. The precursor has a sufficient quantity of sodium species in a vapor phase and at an energy level sufficient to react with the alumina to form sodium-beta'-alumina. The precursor also includes a sufficient quantity of a stabilizing ion with a valence equal to or lower than aluminum to minimize decomposition of sodium-beta'-alumina to sodium-beta-alumina.


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