The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1995
Filed:
Oct. 29, 1993
Applicant:
Inventors:
John R Roth, Knoxville, TN (US);
Peter P Tsai, Knoxville, TN (US);
Chaoyu Liu, Knoxville, TN (US);
Mounir Laroussi, Knoxville, TN (US);
Paul D Spence, Knoxville, TN (US);
Assignee:
The University of Tennessee Research Corporation, Knoxville, TN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
31511121 ; 31511151 ; 1187 / ;
Abstract
A steady-state, glow discharge plasma is generated at one atmosphere of pressure within the volume between a pair of insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. Space between the electrodes is occupied by air, nitrous oxide, a noble gas such as helium, neon, argon, etc. or mixtures thereof. The electrodes are charged by an impedance matching network adjusted to produce the most stable, uniform glow discharge.