The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1995
Filed:
Apr. 30, 1993
Kiyoshi Takimoto, Isehara, JP;
Katsunori Hatanaka, Yokohama, JP;
Kunihiro Sakai, Isehara, JP;
Masahiko Miyamoto, Tokyo, JP;
Hisaaki Kawade, Yokohama, JP;
Yasufumi Sato, Atsugi, JP;
Etsuro Kishi, Sagamihara, JP;
Hideyuki Kawagishi, Ayase, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A scanning probe microscope is used to observe a sample. The same portion of a surface of the sample is scanned forward and backward using a probe. A first signal corresponding to a structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample forward. A second signal corresponding to the structure of the sample is detected from the probe during a period in which the probe scans the surface of the sample backward. When a difference is caused in at least a portion between the first and second signals, the portion of one of the first and the second signals is replaced by a portion of the other signal to generate a corrected signal. An image of the sample is formed using the corrected signal.