The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1995
Filed:
Aug. 25, 1993
Applicant:
Inventor:
Erich Bergmann, Mels, CH;
Assignee:
Balzers Aktiengesellschaft, , LI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419213 ; 20419212 ; 20429803 ; 20429807 ; 20429811 ; 20429815 ; 20429826 ; 20429808 ; 20419238 ; 20429841 ;
Abstract
A method and apparatus for controlling a ratio .gamma.=x/y, for the coating of a work piece with a layer F.sub.x G.sub.y, using plasma-enhanced reactive deposition processes, includes changing the rate at which a solid material is vaporized and also controlling the atmosphere within the vacuum chamber of the apparatus.