The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 1995

Filed:

Apr. 25, 1994
Applicant:
Inventors:

Yoshimitsu Yamauchi, Yamatokoriyama, JP;

Kenichi Tanaka, Nara, JP;

Keizo Sakiyama, Kashihara, JP;

Akitsu Ayukawa, Nara, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 43 ; 437 47 ; 437985 ;
Abstract

A nonvolatile random access memory comprising a nonvolatile random access memory unit having on a substrate an EEPROM having a tunnel oxide film and a floating gate, and a DRAM linked to the EEPROM, a thermal oxide film being selectively formed between the EEPROM and another EEPROM adjacent thereto, the tunnel regions of the respective EEPROMs being provided as self-aligned with the respective ends of the thermal oxide film and positioned at the respective ends of an impurity ion implantation pattern for use in forming a source region of the EEPROMs.


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