The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1995
Filed:
Jun. 30, 1993
Applicant:
Inventors:
Joachim Heinzl, D-8000 Munchen, 90, DE;
Wolfram Runge, Munchen, DE;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16C / ;
U.S. Cl.
CPC ...
384 12 ; 384100 ; 384907 ;
Abstract
A miniature air bearing for supporting and guiding parts has a bearing surface of monocrystalline silicon. Nozzles are formed on the bearing surface by means of anisotropic etching for feeding air.