The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1995
Filed:
May. 14, 1993
Applicant:
Inventors:
Peter G Borden, San Mateo, CA (US);
Martin D Elzingre, Campbell, CA (US);
Assignee:
High Yield Technology, Sunnyvale, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
73 2801 ;
Abstract
An apparatus and a method provide a particle monitor mounted in an exhaust line of a loadlock chamber. The apparatus of the present invention comprises a particle monitor and a particle filter mounted down stream from the particle monitor away from the loadlock chamber. In one embodiment, the particle filter can be implemented by a wire-mesh screen, or a perforated stainless steel screen. The particle filter can be mounted in a centering ring of a standard vacuum connection which comprises two flanges, a centering ring, and an O-ring held together by a clamp.