The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 1995

Filed:

Jul. 17, 1992
Applicant:
Inventors:

Tatsuya Hashinaga, Yokohama, JP;

Masanori Nishiguchi, Yokohama, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
324760 ; 324765 ;
Abstract

A burn-in apparatus for use in burn-in tests includes a burn-in test chamber for accommodating a plurality of semiconductor devices to be tested. The burn-in apparatus further includes measuring means for detecting electric characteristics of temperature sensors built in semiconductor devices to measure junction temperatures of the semiconductor chips built in the semiconductor devices. Based on outputs of the measuring means, control means controls electric power feed amounts to the integrated circuits of the semiconductor chips and/or environmental temperatures in the burn-in test chambers. Thus, the junction temperatures are maintained in a set temperature range, and accuracy of screening tests can be improved.


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