The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1995
Filed:
Mar. 05, 1993
Applicant:
Inventor:
Felix E Fernandez, Mayaguez, PR;
Assignee:
University of Puerto Rico, San Juan, PR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
427596 ; 427597 ; 118 501 ; 118620 ; 118726 ;
Abstract
Method and apparatus for depositing a thin layer of a target material onto a substrate by illuminating the target material with at least one ring-shaped elliptical laser beam so that a ring-shaped deposition plume is emitted from the target material, and positioning the substrate to receive the emitted material. Concentric, ring-shaped elliptical laser beams are formed by use of a multi-faceted negative axicon.