The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1995
Filed:
Dec. 11, 1992
Applicant:
Inventors:
Thomas Gabor, Maplewood, MN (US);
James M O'Kelly, St. Paul, MN (US);
Joseph H Eaton, Roseville, MN (US);
Assignee:
Minnesota Mining and Manufacturing Company, St. Paul, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
B05D / ;
U.S. Cl.
CPC ...
427356 ; 427357 ; 419 24 ; 428408 ;
Abstract
A self-cleaning chemical vapor deposition (CVD) apparatus and method allow CVD reactors to operate long periods of time without manual removal of extraneous materials such as soot and fuzz. The apparatus is made self-cleaning by superposing a scraping member having a surface, such as a glass rod, over an inner surface of a reactor, and effecting relative movement between the inner surface and scraping member surface. Preferably the reactor is tilted at an angle to horizontal to enhance removal of extraneous material.