The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 1995
Filed:
Jun. 01, 1993
Applicant:
Inventors:
Hans Hecht, Korntal, DE;
Wolfgang Kienzle, Hemmingen, DE;
Rudolf Sauer, Benningen, DE;
Eckart Reihlen, Reutlingen, DE;
Kurt Weiblen, Metzingen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F / ;
U.S. Cl.
CPC ...
7320422 ;
Abstract
A mass flow sensor detects the intensity of a media flow. The mass flow sensor includes a measurement chip, with a dielectric membrane and a frame of monocrystalline silicon. At least one heater is arranged on the membrane. The measurement chip is installed in the in-flow channel of a housing. By means of the structure of the housing, contamination of the measurement chip is reduced, thermal equalization with the media flow is improved, the resistance of the sensor to sudden pressure variations is increased, and the dielectric contacts are improved.