The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 1995

Filed:

Nov. 08, 1993
Applicant:
Inventors:

Cornelis S Kooijman, Eindhoven, NL;

Antonius C Gieles, Eindhoven, NL;

Assignee:

U.S. Philips Corporation, New York, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01V / ;
U.S. Cl.
CPC ...
250561 ; 348126 ; 356376 ;
Abstract

Methods, devices and an image sensor for investigating an object (13) by means of a reflectable radiation beam (25) which forms a spot (24) on the object which can be moved relative to the object (13), whereby the actual position of the spot on the object is determined by means of the reflected portion of the radiation beam detected by an optical detector (23), while the desired position of the spot relative to the object is determined by means of a multidimensional image sensor (21). The radiation beam can subsequently be moved relative to the object until the actual position of the spot corresponds to the desired position of the spot, or differences between the actual and the desired position of the spot may be determined as a measure for differences in the distance between the object and a reference plane (62).


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