The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 1995

Filed:

Dec. 02, 1993
Applicant:
Inventors:

Jae G Jeong, Bubaleub, KR;

Youn J Kim, Bubaleub, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 44 ; 437 46 ; 437909 ; 437160 ; 257344 ;
Abstract

An LDD transistor, preventive of the weakening of source/drain junction breakdown voltage and the increase of junction leakage current, and a method for the fabrication of the same. The LDD transistor is comprised of: a field oxide film formed on a predetermined portion of a semiconductor having a low density ion-implanted region therein, the field oxide film having a damaged portion; a gate electrode formed over the field oxide film; an insulating film formed over the gate electrode; a gate polyoxide film resulting from the oxidation of the side wall of the gate electrode; a spacer insulating film formed at the side wall provided by the gate polyoxide film and the insulating film atop the gate polyoxide film; a pad polysilicon film deposited over the insulating film, spacer oxide film, the low density ion-implanted region and the field oxide film; and a high density ion-implanted region formed below the pad polysilicon film, being confined within the low density ion-implanted region.


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