The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 1995
Filed:
Mar. 19, 1993
Greg A Marvell, Lawrenceville, GA (US);
Robert M Genco, Atlanta, GA (US);
Gregory K Mundt, Duluth, GA (US);
Michael B Tanaka, Atlanta, GA (US);
Intelligent Enclosures Corporation, Norcross, GA (US);
Abstract
An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.