The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 1995

Filed:

Apr. 18, 1994
Applicant:
Inventor:

Ichiro Maeda, Tokyo, JP;

Assignee:

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
356237 ; 356394 ; 356398 ;
Abstract

An automatic defect inspection apparatus for a color filter includes a light source for radiating light onto a color filter having a spatially periodical repetitive structure of red, green, and blue, a detector for detecting light from the color filter, and a processor for executing arithmetic processing of the output signal from the detector. In the apparatus, the detector is arranged to detect the light radiated form the light source and transmitted through the color filter, and a diaphragm for limiting the area of the transmitted light incident on the detector in association with an integer multiple of the spatially periodical repetitive structure of red, green, and blue is arranged.


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