The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 1995
Filed:
Nov. 29, 1993
Brian T Cunningham, Watertown, MA (US);
Patricia V Richard, North Billerica, MA (US);
Raytheon Company, Lexington, MA (US);
Abstract
An integrated circuit having a semiconductor layer having formed therein a electronic circuit. An electrical device, electrically connected to the electronic circuit, has a corrugated platform supported over, displaced from, and integrally formed with, the substrate. In a preferred embodiment the electrical device is a bolometer and the electronic circuit is a read out circuit for the device. The platform includes a surface member and a leg, a proximate end of the leg being disposed on the substrate and the distal end being elevated from the substrate and terminating at the surface member. Preferably the leg and the surface member are corrugated. The supporting surface has a corrugation parallel with the leg. The surface member is supported, as a corrugated air-bridge, over the surface of the substrate by corrugated legs. The temperature sensitive resistive material is formed over the corrugated surface member. Electrical conductors are formed over the legs, one end being in contact with the electrical contacts and the other ends being connected to the portions of the temperature sensitive resistive material adjacent the distal ends of the legs.