The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 1995
Filed:
Feb. 19, 1993
Stephen R Leone, Boulder, CO (US);
Struppp Paul G, Boulder, CO (US);
Russell V Smilgys, Fairfax, VA (US);
April L Alstrin, Boulder, CO (US);
The United States of America as represented by the Secretary of Commerce, Washington, DC (US);
Abstract
The present invention provides a photoionization mass spectroscopy flux monitor for gaseous species above a sample surface. It provides an in situ, real time, species specific, nonintrusive probe with a geometry compatible with conventional MBE growth chambers. Gaseous species are photoionized above a sample surface and the ionized gaseous species are extracted parallel to the sample surface and coupled into a mass spectrometer inlet adjacent to the sample surface. The geometry of the flux monitor allows for simultaneous coupling of a charged particle beam with the sample surface, for example for monitoring film growth with RHEED.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile