The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 1995
Filed:
May. 27, 1994
Applicant:
Inventors:
Ulrich Schadeli, Plasselb, CH;
Norbert Munzel, Heitersheim, DE;
Assignees:
Ciba-Geigy AG, Basel, CH;
QCG Microelectronics, West Paterson, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03C / ;
U.S. Cl.
CPC ...
430270 ; 522 31 ;
Abstract
Polymers having a molecular weight (weight average) M.sub.w from 10.sup.3 to 10.sup.6, comprising recurring structural units of the formulae (I), (IIa) and (IIb) ##STR1## in which R.sub.1 is hydrogen or methyl, Y is a direct bond or a divalent radical of the formula (III) ##STR2## in which Z is a C.sub.1 -C.sub.6 alkylene group bound to the phenyl nucleus,
Quick Actions:
Schadeli, Ulrich. (1995). Positive photoresist having improved processing properties (U.S. Patent No. 5397680). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5397680
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