The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 1995
Filed:
Mar. 01, 1993
Applicant:
Inventor:
Frank Voss, Gottingen, DE;
Assignee:
Lamba Physik Gesellschaft zur Herstelling von Lasern mbH, Gottingen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S / ; H01S / ;
U.S. Cl.
CPC ...
372 57 ; 372 59 ; 372 60 ;
Abstract
An excimer laser including a gas reservoir in which gas discharge is effected with the participation of halogen gas, comprises a collecting receptacle which communicates both with the gas reservoir and a halogen gas supply through conduits provided with shutoff valves. This apparatus is suitable for carrying out a method of refilling the gas reservoir of the excimer laser with halogen gas even if the pressure of the halogen gas supply is low and its volume restricted.