The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 1995

Filed:

Sep. 10, 1993
Applicant:
Inventors:

Takashi Fukushima, Shiki, JP;

Takashi Sugihara, Nara, JP;

Junkou Takagi, Kashihara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B / ; G03B / ; G03B / ;
U.S. Cl.
CPC ...
355 71 ; 355 53 ; 355 77 ;
Abstract

A filter for use in a projection photolithographic system comprising:


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