The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 1995
Filed:
Nov. 12, 1993
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An antifuse structure (20) and method of fabrication are provided. A first conductive layer (A) is etched according to a first mask (62a) having a first pattern and according to a second mask (64a) having a second pattern. A first insulative layer (30) is disposed over the first conductive layer (A) and etched according to a third mask (40a) having a third pattern to expose at least one section of the first conductive layer (A). A second insulative layer (26) is disposed adjacent at least one exposed section of the first conductive layer (A). A second conductive layer (1) is disposed over the second insulative layer (26) so that the antifuse structure (20) includes at least one antifuse region (A1) where a section of the second insulative layer (26) is adjacent the first (A) and second (1) conductive layers. The antifuse region (A1) has a sublithographic vertical dimension (t) according to a thickness of the first conductive layer (A). Further, the antifuse region (A1) has a sublithographic horizontal dimension (L) according to an overlap between the first (62a) and second (64a) masks.