Semiconductor device having an optical waveguide interposed in the space

Abstract

A clock signal supply system is disclosed for a semiconductor device with a semiconductor chip and a wiring substrate connected in flip-chip fashion and an optical waveguide interposed in the space between electrode members, in which the mutual arrangement of the electrical interconnection and the optical waveguide interconnection on the wiring substrate is not affected and can be used separately from each other for different applications, thereby improving the throughput of the interconnections as a whole. In order to distribute a very fast clock signal beyond a 1 GHz in particular without any phase deviation in the clock signal supply system, a clock distributor includes a clock oscillator, a phase adjuster for adjusting the phase at each destination of the clock signal, an optical interconnection for supplying the clock signal to the phase adjuster, a reference signal generator for generating a phase reference signal from the clock signal, and an electrical interconnection for supplying the reference signal to the phase adjuster. The clock signal is supplied by an optical interconnection having a broad frequency bandwidth, and the phase reference signal by an electrical interconnection by which the skew is controlled easily. A clock signal adjusted to high phase accuracy can thus be distributed to following destinations by the phase adjuster.