The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1995
Filed:
Jun. 02, 1994
Applicant:
Inventor:
William D Taylor, Sandy Hook, CT (US);
Assignee:
Hughes Aircraft Company, Los Angeles, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F / ;
U.S. Cl.
CPC ...
156345 ;
Abstract
A plasma assembly including an RF head extending into a vacuum chamber and an associated electrode for generating a confined plasma. The assembly includes a sidewall within the chamber forming a plenum about the RF head. The plenum defines a volume substantially smaller than the volume of the chamber and hence, the gas pressure within the plenum is more easily monitored and controlled by the provision of make-up gas.
Taylor, William. (1995). Plasma pressure control assembly (U.S. Patent No. 5391252). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5391252
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile