The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 1995
Filed:
Oct. 14, 1993
Applicant:
Inventor:
Yasuyuki Mizunuma, Kanagawa, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437184 ; 437-5 ; 437 96 ; 437912 ; 156646 ;
Abstract
A selective etching method by etching a III-IV group compound semiconductor which is substantially free from Al and which is disposed adjacent to a III-IV group compound semiconductor containing Al, using a mixed gas at least containing a gas containing C and F as constituent gases and a gas containing Si and Cl as constituent gases.