The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 1995
Filed:
Mar. 18, 1992
Shizuki Sakurai, Nagoya, JP;
Shiro Kuwahara, Anjo, JP;
Nakane Kunie, Kariya, JP;
Ryota Takagi, Hamamatsu, JP;
Toyoda Koki Kabushiki Kaisha, Kariya, JP;
Abstract
A capacitive acceleration sensor is composed of a silicon plate, a glass plate and a substrate. The silicon plate has a fixed portion and a movable portion supported by the fixed portion through spring beams. The movable portion is moved in response to the change in the acceleration and is provided with a moving electrode thereon. The glass plate is provided with a fixed electrode and anodically bonded to the silicon plate so that the fixed electrode faces the moving electrode with a predetermined gap. On the glass plate, a first dummy electrode is formed at a location corresponding to the spring beams of the silicon plate. The dummy electrode has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the plates. On the substrate, a second dummy electrode is formed at a location corresponding to the movable portion of the silicon plate. The dummy electrode, similarly, has a terminal portion at one end so as to be electrically connected with the silicon plate during anodic bonding of the silicon plate and the substrate.