The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1995
Filed:
May. 24, 1993
Applicant:
Inventors:
David K Halliday, Greenock, GB;
Colin D McCall, Gourock, GB;
Alexander S McKinnon, Gourock, GB;
Christopher D Smith, Glasgow, GB;
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N / ;
U.S. Cl.
CPC ...
378 58 ; 378 21 ; 378 22 ;
Abstract
An X-ray computerized system for programmable, high-resolution X-ray inspection of manufactured electronic circuits. Such a system comprises: means for directing X-rays to produce X-ray images representing illuminations of circuit elements from different angles; and detecting means for detecting said images, said detecting means comprising a plurality of detectors, each of said detectors positioned to intercept X-rays after passing through a circuit element from a particular associated angle of illumination.