The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1995
Filed:
May. 28, 1993
Applicant:
Inventors:
Assignee:
The University of Tennessee Research Corp., Knoxville, TN (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H05B / ;
U.S. Cl.
CPC ...
31511121 ; 1187 / ; 31323131 ; 20429804 ;
Abstract
A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an atmosphere other than atmospheric air between the electrode surfaces. Space between the electrodes is occupied by a noble gas such as helium, neon, argon, etc. or mixtures thereof.