Fluid distribution manifold

Abstract

A compact manifold for distribution of fluids (gas or liquid or combination thereof). The manifold has a block having fluid channels provided therethrough between two faces of the block. Against one face, a plate is fastened which swages ferrules between the plate and the block to tightly connect fluid conduits through the plate to the block. On the opposite face of the block, a manifold plenum is formed in a groove between a manifold plate and an o-ring. The o-ring is pressed against the manifold plate by a back plate and both plates are securely fastened onto the block such that the holes in the manifold plate are aligned with the fluid channels in the block. Checkvalves are positioned between the block and the manifold plate to prevent backflow. The above-mentioned components are positioned into their respective places and are secured upon the tightening of the fasteners. The manifold is configured with at least two plenums each having a group of distribution outlets. A checkvalve is provided at each outlet on the plenums. The plenums are connected to a single source in cascade, whereby the plenums are connected via a length of small diameter tubing which serves as a barrier against diffusion of fluid between the plenums. Thus, there are at least two checkvalves and a diffusion barrier tubing in the flow path between two reagent containers.