The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 1995
Filed:
Aug. 09, 1993
Applicant:
Inventor:
Akitoshi Toda, Tokyo, JP;
Assignee:
Olympus Optical Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
250216 ; 250234 ; 250306 ; 156647 ; 437225 ;
Abstract
A method of making a cantilever chip for a scanning probe microscope wherein the cantilever chip includes a cantilever portion, a probe portion formed at a free end of the cantilever portion, a mirror portion formed on the cantilever portion on a side opposite to a side where the probe portion is formed, and a support portion for supporting the proximal end of the cantilever portion. A step is formed between the cantilever portion and the support portion, so that the support portion is set back from the surface of the cantilever portion on the side where the probe portion is formed. Semiconductors manufacturing processes and etching processes are used.