The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 1995

Filed:

Nov. 06, 1992
Applicant:
Inventors:

Masaji Takahashi, Tokyo, JP;

Yuji Kondo, Tokyo, JP;

Assignee:

NEC Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P / ;
U.S. Cl.
CPC ...
7351 / ; 361280 ;
Abstract

An acceleration sensor comprises an upper semiconductor substrate having a rigid frame, four deformable beams connected with the rigid frame, and a weight portion supported by the plurality of deformable beams, a lower semiconductor substrate bonded to the rigid frame, a plurality of movable electrodes attached to the weight portion, and electrically isolated from one another, and a plurality of stationary electrodes attached to the second semiconductor substrate, and opposite to the plurality of movable electrodes for forming a plurality of variable capacitors, and the center of gravity of the weight portion is spaced from a common neutral surface of the four beams for allowing acceleration to produce bending moment exerted on the four beams, thereby causing the variable capacitors to independently change the capacitance.


Find Patent Forward Citations

Takahashi, Masaji. (1995). Three-axis acceleration sensor variable in capacitance under application (U.S. Patent No. 5383364). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/5383364

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…