The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 1995
Filed:
Jul. 31, 1992
Applicant:
Inventors:
Pervaiz Sultan, San Jose, CA (US);
Steven C Avanzino, Cupertino, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; H01L / ;
U.S. Cl.
CPC ...
437231 ; 437978 ;
Abstract
An improved interconnect space filling process which provides voidless space filling for aspect ratio .ltoreq.1.88 by adding one step to the prior art process to change the aspect ratio of the space to be within specification aspect ratios for the older process. The added step is to apply a highly viscous single spin of SOG after applying a thin CVD PETEOS layer overtop the metallization.