The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 1995
Filed:
Mar. 30, 1993
Applicant:
Inventors:
Klaus Hartig, Brighton, MI (US);
Joachim Szczyrbowski, Goldbach, DE;
Assignee:
Leybold AG, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ; B65G / ;
U.S. Cl.
CPC ...
414217 ; 118719 ; 118729 ; 20429825 ;
Abstract
A transport car open at the top and supported on rollers moves a substrate from a first coating chamber to a second coating chamber separated by a gate 7 running transversely of the direction of movement of the transport car 5. The gate 7 is formed of an upper gate part 8 and a lower gate part 9 forming a slot 10 which is adaptable to the cross section of the car. A cover associated with the top gate part and parallel to the direction of movement has an area greater than the car in order to minimize gas transfer between chambers.