The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 1995
Filed:
Jun. 17, 1993
David E Henderson, Fremont, CA (US);
VLSI Technology, Inc., San Jose, CA (US);
Abstract
A rotatable flange union for use with vacuum systems includes a first flange, a second flange and a connector which connects the first flange to the second flange and allows the first flange to rotate 360 degrees with respect to the second flange. In the preferred embodiment, tubing of the first flange is placed within tubing of the second flange. Additionally, the connector includes a first quad ring seal, a second quad ring seal, and a cavity in the second flange. The first quad ring seal is in contact with an inner diameter of the second flange and is in contact with an outer diameter of the first flange. The second quad ring seal is in contact with the inner diameter of the second flange and is in contact with the outer diameter of the first flange. The cavity is between the first quad ring seal and the second quad ring seal. The cavity is pumped to a pressure of less than ten millitorr.