The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 10, 1995
Filed:
May. 24, 1993
Applicant:
Inventor:
Kunihiko Tsuji, Takasago, JP;
Assignee:
Kabushiki Kaisha Kobe Seiko Sho, Kobe, JP;
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20429841 ; 20429805 ; 20419238 ; 20429823 ;
Abstract
The present invention provides an arc ion plating system capable of easily moving a cathode and a workpiece in and out of a vacuum chamber for exchange, surface cleaning, and the like. A door is provided for opening/closing an opening portion provided on the vacuum chamber. A movable carrier that is movable in and out of the vacuum chamber through the opening portion is mounted. The cathode and the workpiece are provided on the movable carrier. The cathode and the workpiece that are mounted on the movable carrier are carried in and out of the vacuum chamber together with the movable carrier.