The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 03, 1995
Filed:
Nov. 01, 1993
Applicant:
Inventors:
Kazuaki Satoh, Kawasaki, JP;
Kenji Iida, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C23F / ;
U.S. Cl.
CPC ...
156643 ; 156656 ; 156902 ;
Abstract
A method of forming a conductive pattern layer structure includes providing an insulating member containing polyimide, forming a patterned thin film on the insulating member, and forming a patterned conductive layer on the thin film. The patterned conductive layer contains copper. Further, a barrier layer can be patterned to cover an upper surface and side surfaces of the patterned conductive layer to prevent copper from being diffused into another insulating layer formed around the patterned barrier layer.