The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 1994
Filed:
Nov. 04, 1992
Applicant:
Inventors:
Craig C Collins, Santa Cruz, CA (US);
Eric A Ahlstrom, Santa Cruz, CA (US);
Assignee:
Watkins-Johnson Company, Palo Alto, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
F24H / ; F24H / ;
U.S. Cl.
CPC ...
392479 ; 392480 ; 392484 ; 392491 ;
Abstract
A heater for heating processing gases used in semiconductor processing equipment; the heater including a chamber whose walls are heated by a strip heater whereby gases flowing through the chamber are heated by said heated walls.