The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 13, 1994

Filed:

Jul. 26, 1993
Applicant:
Inventors:

Noriyuki Yoshida, Osaka, JP;

Satoshi Takano, Osaka, JP;

Kousou Fujino, Osaka, JP;

Shigeru Okuda, Osaka, JP;

Tsukushi Hara, Chofu, JP;

Hideo Ishii, Chofu, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B / ; H01L / ;
U.S. Cl.
CPC ...
117 98 ; 505434 ; 505430 ; 505474 ; 505729 ; 505730 ; 505732 ; 427 62 ; 427596 ;
Abstract

Disclosed herein is a method of forming a single-crystalline thin film having excellent crystallinity on a base material without depending on the material for and crystallinity of the base material. In this method, a base material is provided thereon with a mask which can prevent chemical species contained in a vapor phase from adhering to the base material. The base material is continuously moved along arrow A, to deliver a portion covered with the mask into the vapor phase for crystal growth. Thus, a thin film is successively deposited on the portion of the base material, which is delivered from under the mask, from the vapor phase. A crystal growth end is formed on a boundary region between a portion of the base material which is covered with the mask and that which is exposed to the vapor phase, so that a crystal having the same orientation as the growth end is grown on a portion of the base material newly exposed by the movement.


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