The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 06, 1994

Filed:

Nov. 19, 1992
Applicant:
Inventors:

Kwan F Koo, Ames, IA (US);

Glenn L Schrader, Ames, IA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
20419215 ; 20419216 ;
Abstract

A method is provided to form a basal oriented coating of molybdenum sulfide of the formula MoS.sub.2 on a substrate by employing the techniques of reactive sputtering comprising: (a)(i) sputtering lead (Pb) and molybdenum (Mo) from homogeneous targets of Pb and Mo in vacuo in an atmosphere of argon and hydrogen sulfide or (ii) sputtering Pb and MoS.sub.2 from homogeneous targets of Pb and MoS.sub.2 in an atmosphere of argon (no H.sub.2 S), so as to deposit a coating comprising of Pb, S and Mo on said substrate; and (b) annealing said coating at a pressure at which the Pb is lost from the coating; wherein the targets and the substrate are contained within a vacuum chamber during steps (a) and (b).


Find Patent Forward Citations

Loading…