The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1994
Filed:
Mar. 26, 1993
Applicant:
Inventors:
Andreas Elsaessser, Idstein, DE;
Hans W Frass, Wiesbaden, DE;
Otfried Gaschler, Wiesbaden, DE;
Dieter Mohr, Budenheim, DE;
Gerhard Buhr, Koenigstein, DE;
Assignee:
Hoechst Aktiengesellschaft, Frankfurt am Main, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430165 ; 430191 ; 430192 ;
Abstract
The invention relates to a usually positive-working radiation-sensitive mixture which contains as essential components a binder which is insoluble in water and soluble in aqueous-alkaline solutions, a 1,2-quinone diazide and a compound which diminishes the developer solubility of the exposed regions by heat treatment, in which the compound which diminishes the developer solubility which is present is at least one urethane of the formula I: ##STR1## in which R.sub.1 is hydrogen or methyl,