The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1994
Filed:
Jan. 21, 1994
Hiroshi Sekizuka, Shiroyama, JP;
Tokyo Electron Sagami Kabushiki Kaisha, Kanagawa, JP;
Abstract
This invention relates to a sealing apparatus for use in heat treating apparatuses, ion injection apparatuses, etching apparatuses and other devices which require air sealing. Such devices may be used in semiconductor manufacturing. Mounting portions are formed in the sealing apparatus so as to separate an inner-side portion and an outer-side portion of a flange contact portion of a manifold and a process tube of a process container. Air is exhausted from the area between the inner-side portion and the outer-side portion of the flange contact portion of the manifold and the process tube. Two metal seal members are mounted to the mounting portions. These metal seal members have different surface processing thereon. The middle portion between the metal seal members is connected to an air exhaust source and air is exhausted to create a vacuum therein. This provides the sealing function to seal the process tube and the manifold.