The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1994
Filed:
Jun. 07, 1993
Applicant:
Inventor:
Mitsutoshi Kuno, Sagamihara, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G / ;
U.S. Cl.
CPC ...
414786 ; 901-8 ;
Abstract
A method of transferring a substrate between a stage for holding a substrate thereon and a conveying hand for conveying the substrate is disclosed. In one aspect, the method includes the steps of: moving the conveying hand having the substrate held thereon to a stage attraction starting position; starting attraction, through the stage, of the substrate held by the conveying hand; moving the conveying hand to a transfer position on a side of an attracting surface of the stage remote from the stage attraction starting position; and releasing the attraction of the substrate through the conveying hand.