Damper device and method of its use, and a device for manufacturing

Abstract

A damper device has a fixed member and a movable member, one being inside of the other. An electroviscous fluid is sealed between these two members, and opposed electrodes are arranged at respective positions of the two members to allow relative flow of the electroviscous fluid. The portions of the movable and fixed members that are in sliding contact are shielded against the electroviscous fluid by a flexible member between these two members. In an apparatus for manufacturing semiconductors according to the invention, an arm is provided on the movable member to move along the axial direction of the guide bar when the movable member moves. A flexible member is provided between respective ends of the fixed guide bar and respective ends of the arm to maintain the internal space liquid-tight, and an electroviscous fluid is sealed inside the flexible member and between the arm and the guide bar. A positive electrode and a negative electrode are formed utilizing two opposed members such as the arm and the guide bar, to which a voltage is applied to the electrodes while the voltage application is suspended when the movable member is to be moved.