The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 1994

Filed:

Oct. 16, 1992
Applicant:
Inventors:

Shigeki Tsuchitani, Mito, JP;

Seiko Suzuki, Hitachioota, JP;

Satoshi Shimada, Hitachi, JP;

Masayuki Miki, Katsuta, JP;

Masahiro Matsumoto, Hitachi, JP;

Susumu Murakami, Katsuta, JP;

Akira Koide, Chiyoda, JP;

Masahiro Kurita, Katsuta, JP;

Hiromichi Ebine, Oomiya, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G / ; H01G / ; G01P / ;
U.S. Cl.
CPC ...
361280 ; 3612831 ; 3612833 ;
Abstract

An electrostatic type micro accelerometer comprising means for preventing permanent sticking between a movable electrode and a stationary electrode due to residual dielectric polarization, resisual electric charges and water adsorption and condensation around possible contacting portions therebetween when the movable electrode excessively displaces. The sticking preventing means is realized by disposing one of electric field reducing means, water adsorption and condensation reducing means and contacting area limiting means around the possible contacting portions.


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