The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 1994

Filed:

Nov. 18, 1992
Applicant:
Inventor:

Brian L Norling, Mill Creek, WA (US);

Assignee:

AlliedSignal Inc., Morris Township, Morris County, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310370 ; 7386259 ; 310321 ;
Abstract

A force sensing element is formed with four vibrating beams having substantially the same width and length. The four beams are spaced apart and disposed parallel to one another and are connected at opposite ends by end portions. With such a configuration, the outer beams move in phase with each other but 180.degree. out of phase with the inner beams. As such, the linear and angular reaction forces at the end portions are effectively cancelled. One advantage of such a configuration is its relative insensitivity to manufacturing process variations. By utilizing four beams which are nearly identical in width, variation in fabrication tolerance has virtually an equal effect on beam mass such that the dynamic balance of the force sensing element is maintained to a high degree of accuracy. Various drive methodologies for the force sensing element are disclosed as well as force sensing elements with integrally-formed isolator systems.


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