The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 22, 1994

Filed:

Apr. 06, 1993
Applicant:
Inventors:

Raymond L Zukowski, Vista, CA (US);

Randy S Willis, Vista, CA (US);

Assignee:

Rayzist Photomask, Inc., Vista, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B / ;
U.S. Cl.
CPC ...
156642 ; 430269 ; 430308 ; 239127 ; 156905 ; 1562724 ;
Abstract

Uncured emulsion is effectively washed from a stencil in the production of photomasks by mounting a drum rotatable about a horizontal axis within a portable cabinet. The drum is driven by a small (e.g. variable speed 1/16 HP) electric motor and spins at about 50-100 rpm. Water is sprayed onto the stencil mounted on the drum at about 80 psi by 4-10 V-jet nozzles. Liquid running off the stencil is collected by a catch basin mounted just below the drum, and passes through a drain pipe with strainer into a heat insulated holding tank with an electric resistance heating element, and is recirculated from the tank to the spray nozzles-by a high pressure pump. The pump and motor are controlled by a timer, and after completion of the washing cycle the stencil is removed from the cabinet.


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