The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 08, 1994
Filed:
Apr. 12, 1993
Applicant:
Inventor:
James R Woodruff, Redmond, WA (US);
Assignee:
AlliedSignal Inc., Morris Township, Morris County, NJ (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01P / ;
U.S. Cl.
CPC ...
7351 / ;
Abstract
A servo accelerometer permits compliant suspension with a pair of flexures by using a plurality of tunnel current position sensors each respectively associated with a corresponding pair of electrostatic drive electrodes. The tunnel current position sensors and the electrostatic drive electrodes are positioned to control undesired movement of the proof mass about a first axis which is normal to the input axis of the accelerometer. In another embodiment, three tunnel current sensors and three pairs of drive electrodes are used to control movement of the proof mass about the first axis and a second axis.