The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1994
Filed:
Oct. 04, 1993
Osamu Monoe, Sagamihara, JP;
Tokyo Electron Sagami Kabushiki Kaisha, Kanagawa, JP;
Abstract
A forced cooling apparatus for a heat treatment apparatus comprising a heat treatment furnace having a process tube with one end open at an furnace opening and another end closed at an furnace top portion; and a heater portion which covers the process tube, and wherein cooling of the heat treatment furnace is performed by forced cooling by flowing air into a gap formed between the heater portion and the process tube and which extends to the furnace top portion. The forced cooling apparatus comprises a plural number of air intake openings provided at the furnace opening portion for flowing air from an open end of the process tube and into the gap, an exhaust opening provided at the furnace top portion for flowing air which has flowed into the gap, from the vicinity of a middle portion on a side of a closed end of the process tube to outside the heater portion, an exhaust means connected to the exhaust opening, a shutter means for closing the air intake openings, and a shutter means for closing the exhaust opening. This configuration allows the air inside the furnace to be naturally exhausted from the exhaust opening to outside of the furnace, and allows uniform forced cooling of the heat treatment apparatus.